Super High Rate Thermal Plasma CVD of Ceramics
نویسندگان
چکیده
منابع مشابه
review of the mechanical and thermal properties of high temperature Diboride ceramics
Ceramic borides, carbides and nitrides with high melting point, relatively good resistance to oxidation and corrosive environments are considered by many researchers in various high temperature industries, which is known from the family of materials as high temperature ceramic (UHTC). To be. All UHTCs have very strong bonds that give them structural stability at high temperatures, and among the...
متن کاملLow-pressure CVD and Plasma- Enhanced CVD
LPCVD is a process used in the manufacturing of the deposition of thin films on semiconductors usually ranging from a few nanometers to many micrometers. LPCVD is used to deposit a wide range of possible film compositions with good conformal step coverage. These films include a variety of materials including polysilicon for gate contacts, thick oxides used for isolation, doped oxides for global...
متن کاملUltra High Temperature Ceramics: Densification, Properties and Thermal Stability
Hypersonic flights, re-entry vehicles, and propulsion applications all require new materials that can perform in oxidizing or corrosive atmospheres at temperatures in excess of 2000°C and sometimes over the course of a long working life. Ultra High Temperature Ceramics (UHTCs) are good candidates to fulfill these requirements. Within this family, the ZrB2 and HfB2 based composites are the most ...
متن کاملOn the kinetics of modified CVD in porous ceramics
This paper reports a kinetic study on modified CVD process in porous ceramic substrates by both theoretical analysis and experimental approach. The theoretical analysis indicates that with a heterogeneous chemical reaction the decrease of the pore size is proportional to the deposition time and the pore closure time is proportional to the original pore size. While for a homogeneous reaction the...
متن کاملMicrostructure of spark plasma sintered TiB2 and TiB2–AlN ceramics
In this research study, the effects of aluminum nitride (AlN) additive on the densification behavior and microstructure development of titanium diboride (TiB2) based ceramic matrix composite were investigated. In this way, a monolithic TiB2 ceramic and a TiB2–5 wt% AlN ultrahigh temperature ceramic composite were fabricated by spark plasma sintering (SPS) proces...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 1989
ISSN: 0914-5400,1882-1022
DOI: 10.2109/jcersj.97.49